| Measured quantities | Roundness, waviness, concentricity, coaxiality, parallelism, flatness, squareness, eccentricity, runout (identical across the three models) |
| Spindle accuracy | ±0.035 μm (all three models) |
| System accuracy | ≤0.05 μm (all three models) |
| Spindle speed | 5 r/min (all three models) |
| Max table load | 40kg | 60kg | 60kg |
| Effective table diameter | 200mm | 256mm | 300mm |
| Min workpiece bore | 3 mm (all three models) |
| Measuring height | 450 mm (all three models) |
| Rotary worktable | Precision levelling and centring (all three models) |
| Sensor traversing | Joystick-controlled motorized (all three models) |
| Measuring range | ±50 μm / ±100 μm / ±400 μm (all three models) |
| Measuring resolution | 0.01 μm (all three models) |
| Max sampling resolution | 8192 points/rev (all three models) |
| Digital filter bands | 2-15, 2-50, 2-150, 2-500, 15-150, 15-250 (all three models) |
| Magnification | 400 / 1000 / 2000 / 4000 / 10,000 / 20,000 / 40,000 / 80,000 / 100,000 (all three models) |
| Roundness evaluation | LSC, MZC, MIC, MCC (all three models) |
| Other functions | Harmonic analysis, slope analysis, database archiving (all three models) |
| Extended functions | Partial-arc roundness, motor commutator roundness, wafer-to-wafer variation (all three models) |
| Accessories | Precision three-jaw chuck, partial-arc software, commutator software (all three models) |
| Working air pressure | 0.40–0.43 MPa (all three models) |
| Supply air pressure | 0.45–0.80 MPa (all three models) |
| Main unit dimensions | 800 x 500 x 1450 mm (all three models) |
| Main unit weight | approx. 220 kg (all three models) |